Aug 14 - China’s first domestic commercial electron beam lithography machine "Xizhi" is in application testing at Zhejiang University’s Hangzhou base. Matching international precision, it’s a homegrown tool with independent IP for quantum chip R&D.
Resembling a large steel cabinet, this self-developed 100kV machine (via provincial key labs) is dubbed a "nano magic pen" that can carve a city map on a hair strand. Named after calligrapher Wang Xizhi, it uses a high-energy electron beam to etch circuits, with 0.6nm precision, 8nm line width, and mask-free design flexibility—ideal for early chip R&D debugging.
Previously blocked by export controls, "Xizhi" (priced below global average) is in talks with firms and research bodies to break the barrier.
ICgoodFind: "Xizhi" fills a gap, boosting domestic quantum chip R&D.
