Chinese equipment maker AMEC (Advanced Micro-Fabrication Equipment Inc.) launched four new products at SEMICON China 2026, expanding its portfolio across silicon and compound semiconductor critical processes. The new releases include:
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Primo Angnova™: Inductively coupled plasma (ICP) etcher for 5nm and below logic and advanced memory
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Primo Domingo™: High-selectivity etcher for GAA, 3D NAND, and DRAM
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Smart RF Match: Intelligent RF matching system
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Preciomo Udx®: MOCVD system for blue and green Micro LED mass production
Primo Angnova™ tackles high-aspect-ratio etching challenges at advanced nodes. It features a center-pump design, high gas flow control, and AMEC’s proprietary second-generation LCC RF coil with DC magnetic field assist. A 200-zone temperature-controlled ESC delivers excellent within-wafer uniformity. The system can be configured with up to six main etching chambers on the proven Primo C6V3 transport platform.
Primo Domingo™ addresses high-selectivity etching for 3D device architectures. It uses a fully symmetric chamber design with fast pulsed gas control, corrosion-resistant materials, and dual cooling/heating wafer stages for precise temperature control. It shares the same transport platform, allowing flexible chamber configurations.
Smart RF Match introduces a dedicated RF loop network concept, using EtherCAT for real-time signal transmission between RF generator and matching network. The system shifts from passive response to active control, achieving microsecond-level impedance adjustment. Customer tests show a 225% faster matching speed and 15% higher etching efficiency.
Preciomo Udx® adopts a novel horizontal dual-rotating reactor design for Micro LED production. It processes 18 six-inch or 12 eight-inch GaN wafers simultaneously, with independent chamber control. Automated EFEM and SMIF handling reduce particle counts, meeting the stringent uniformity and defect requirements for Micro LED mass production.
Since its founding in 2004, AMEC has shortened new product development cycles from 3–5 years to under two years. The company now has over 20 new equipment projects in development for 2025.
ICgoodFind: AMEC just dropped four new tools across etching, deposition, and intelligent subsystems. The portfolio keeps expanding, and the platform strategy is taking shape.
